Geometry optimization of uncoated silicon microcantilever-based gas density sensors

Spatial optimization of an array of aligned microcantilever based sensors

The present work establishes the optimized spatial arrangement for an array of aligned microcantilever sensors placed inside a fluidic cell. The results of the present investigation show that the optimum spacing distance between the microcantilevers decreases as the fluidic cell height decreases. An increase in the flow Reynolds number is found to increase the optimum spacing distance. However,...

Silicon Carbide-Based Hydrogen Gas Sensors for High-Temperature Applications

We investigated SiC-based hydrogen gas sensors with metal-insulator-semiconductor (MIS) structure for high temperature process monitoring and leak detection applications in fields such as the automotive, chemical and petroleum industries. In this work, a thin tantalum oxide (Ta2O5) layer was exploited with the purpose of sensitivity improvement, because tantalum oxide has good stability at high...

Porous Silicon Structures as Optical Gas Sensors

We present a short review of recent progress in the field of optical gas sensors based on porous silicon (PSi) and PSi composites, which are separate from PSi optochemical and biological sensors for a liquid medium. Different periodical and nonperiodical PSi photonic structures (bares, modified by functional groups or infiltrated with sensory polymers) are described for gas sensing with an emph...

In-Plane All-Photonic Transduction Method For Silicon Photonic Microcantilever Array Sensors

In-plane All-photonic Transduction Method For Silicon Photonic Microcantilever Array Sensor Jong Wook Noh Department of Electrical and Computer Engineering Doctor of Philosophy We have invented an in-plane all-photonic transduction method for photonic microcantilever arrays that is scalable to large arrays for sensing applications in both bioand nanotechnology. Our photonic transduction method ...

Microcantilever Sensors for In-Situ Subsurface Characterization